MEMS & PIC R&D

Piezoelectric single-crystal platforms for MEMS and PIC research and development.

iBULe advances piezoelectric MEMS scanners, silicon-compatible processing, smart optics, LiDAR, and photonic actuation technologies through integrated material and device R&D.

8-inchSilicon Process Compatibility
5.5V / 30°Low-Voltage MEMS Scanning
PMN-PTPiezoelectric Actuation Platform
MEMS / PICIntegrated R&D Direction
MEMS & PIC R&D

Piezoelectric single crystal integrated with silicon and photonics.

The R&D roadmap connects large-diameter crystal growth with 8-inch-compatible processing, MEMS mirror actuation, smart optics, LiDAR, and photonic integration.

8-inch-compatible wafer platform

8-Inch-Compatible Wafer Platform

Large-area single-crystal materials are positioned for coupling with 8-inch semiconductor processing to enable scalable MEMS / PIC manufacturing.

PMN-PT MEMS scanner board

PMN-PT MEMS Scanner

The MEMS scanning mirror architecture is designed for low-voltage drive, simplified assembly, and scalable production.

Smart glasses and wearables

Smart Glasses & Wearables

The technology direction extends toward AR/VR smart-glass optical systems where compact, low-power beam steering is critical.

Wearable optics ecosystem

Wearable Optics Ecosystem

MEMS scanning platforms support compact wearable-display and beam-steering architectures for next-generation optical products.

LiDAR module

LiDAR Modules

MEMS mirror technology also supports optical scanning for LiDAR-class systems, where size, scan angle, and low-voltage actuation matter.

LS21E optical device

Optical Engine Direction

Compact optical-engine form factors extend the platform toward future sensing, wearable, and imaging systems.

Photonic Integration

Actuation translated into optical phase control.

A bonded PMN-PT layer applied to a TriPleX® waveguide stack converts voltage into mechanical strain and optical phase control while keeping the actuator outside the optical mode.

Photonic integration waveguide diagram

PMN-PT / TriPleX Waveguide Stack

A thin PMN-PT actuator layer, electrodes, and bonded waveguide stack enable photonic modulation and actuation concepts.

Photonic resistance result

High Internal Resistance Stability

Long-term electrical behavior demonstrates the high internal resistance and low quasi-DC power profile of PMN-PT for photonic actuation.

Discuss MEMS and PIC R&D collaboration with iBULe

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